Lecture Notes
lecture7.pdf
Description:
Focusses on MEMS devices and technology overview, anisotropic etching, description of the process and testing, silicon nitride as a mechanical material, references.
Resource Type:
Lecture Notes
pdf
870 kB
lecture7.pdf
Course Info
Instructors
As Taught In
Fall
2005
Level
Learning Resource Types
grading
Exams with Solutions
notes
Lecture Notes
assignment
Problem Sets
Problem Set Solutions
